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Project title: VEGA 1/0853/13, Investigation of microstructural, electrical and optical properties of semiconductor-dielectric systems
Project start (MM/YY): 01/13
Project completion (MM/YY): 12/15
Granted by: VEGA
Investigator Consortium:   
- RNDr. Stanislav JUREČKA, PhD., principal investigator, Faculty of Electrical Engineering, University of Žilina, Žilina
- doc. Ing. Igor JAMNICKÝ, CSc., Faculty of Electrical Engineering, University of Žilina, Žilina
- Ing. Miroslav ĎULÍK, PhD., Faculty of Electrical Engineering, University of Žilina, Žilina
- RNDr. Róbert MENKYNA, CSc., Faculty of Electrical Engineering, University of Žilina, Žilina
- RNDr. Peter HOCKICKO, PhD., Faculty of Electrical Engineering, University of Žilina, Žilina
- Ing. Libor LADÁNYI, Faculty of Electrical Engineering, University of Žilina, Žilina
- RNDr. Emil PINČÍK, CSc., Institute of Physics, SAS, Bratislava
- doc. RNDr. Mária JUREČKOVÁ, PhD., Institute of Mathematics, SAS, Bratislava
- prof. Ing. Ján MUDROŇ, CSc., Academy of Armed Forces of gen. M. R. Štefánik, Liptovský Mikuláš
Project goals:
   Semiconductor-dielectric (s/d) systems with ultra-thin oxide film (quantum effects, strong fields). Theoretical model of development of microstructure, charge states, transport processes and optical properties of s/d interfaces. Experimental investigation of NAOS SiO2/Si systems morphology. Statistical and multifractal model of morphology. Experimental investigation of Q-states development (quantum and multifractal model, C-V, I-V, DLTS). Experimental investigation of optical properties (multi-layer structures). Numerical algorithms (construction and solution of theoretical models, optimalization via experimental data, parameters extraction, multiparametrical analysis). Platform creation for solution of s/d systems (experiment and methods).

 

 

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